Semiconductor Sensors by Simon M. Sze, Hardcover | Indigo Chapters

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. | Semiconductor Sensors by Simon M. Sze, Hardcover | Indigo Chapters